Speaker
Description
Vapor deposition encompasses a vast array of techniques ranging from chemical vapor deposition (CVD) processes like metal-organic vapor phase epitaxy (MOVPE) to physical vapor deposition (PVD) processes like pulsed laser deposition (PLD). These processes are used within a diverse set of industries to deposit thin films and coatings for everything from television screens to corrosion protection. In order to further develop and apply these techniques it is crucial that we share a common understanding of the various terms and concepts we use to record and describe these processes. Therefore, we present an ontology for vapor deposition which extends the work of the Chemical Methods Ontology (CHMO), which is based on the Ontology for Biomedical Investigations (OBI), which in turn is based on the Basic Formal Ontology (BFO). In addition to the ontology development, we show how it has been practically implemented in the NOMAD repository and electronic lab notebook (ELN) as part of the NFDI project FAIRmat. Specifically, we show the implementation of MOVPE, PLD, molecular beam epitaxy (MBE), (reactive) sputter deposition, and thermal deposition techniques as well as how this implementation facilitates the interoperability and reusability of process data between co-workers, labs, and institutes on an international level.